If you’re blessed with high water pressure at home, you probably love how it helps blast grime from your dishes and provides ...
Abstract: Flexible capacitive pressure sensors have gained significant attention in flexible electronics, offering extensive material and design options for various active sensing needs. Despite ...
Abstract: This letter presents the design methodology and heterogeneous fabrication process of a novel dual-mode microelectromechanical systems gas pressure sensor that vertically integrates ...
Key Laboratory of Microsystems and Microstructure Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin 150080, China ...
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