Deep vertical holes and re-entrant features challenge the best metrology methods.

National Institute of Metrology, Quality and Technology (INMETRO), MDIC has the following research output in the current window (1 October 2024 - 30 September 2025) of the Nature Index. Click on Count ...

Metrology is a broad field that refers to the science of measurement, both theoretical and experimental, and its application in industrial settings is termed industrial metrology. Thus, industrial ...

Virtual metrology is carefully being added into semiconductor manufacturing, where it is showing positive results, but the chip industry is proceeding cautiously. The first use of this technology has ...

Metrology is the science of the study of measurement and is derived from the Greek words metro (means measurement) and logy (means study). It involves theoretical and practical aspects of measuring, ...

FREMONT, Calif.–Therma-Wave Inc. today announced the first critical dimension (CD) metrology tool that combines spectroscopic ellipsometry technology for high levels of optical measurement with ...

Optical metrology is the science and technology of making measurements with use of light as standards or information carriers. Although optical metrology is a rapidly growing area, it is not a new ...

VELDHOVEN, the Netherlands — ASML Optics today (October 27, 2003) announced its first product–a metrology technology that enables reliable measurements of dimensions approaching the atomic scale.

MINNEAPOLIS--(BUSINESS WIRE)--CyberOptics ® Corporation (NASDAQ: CYBE), a leading global developer and manufacturer of high-precision 3D sensing technology solutions, will feature the WX3000™ ...

NAGOYA, Japan, September 01, 2025--(BUSINESS WIRE)--It was announced today that GaN (Gallium Nitride)-based e-Beam inspection and metrology for advanced semiconductor manufacturing, jointly developed ...